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Electronic Ultrapure Water System
National Standard for Ultrapure Water in China's Electronics Industry GB/T1146.1-1997


Index NameEW-1EW-2EW-3EW-4

Resistivity MΩ.CM(250C)

18 (95% of the Time) Not Less Than 1715 (95% of the Time) Not Less Than 13120.5
Silicon ≤μg/L210501000
Number of Particles >1μm0.1510500
Number of Bacteria ≤个/mL0.010.110100
Copper ≤μg/L0.212500
Zinc ≤μg/L0.212500
Nickel ≤μg/L0.112500
Sodium ≤μg/L0.5251000
Potassium ≤μg/L0.525500
Chlorine ≤μg/L11101000
Nitrate ≤μg/L115500
Phosphate Radical ≤μg/L115500
Sulfate Radical ≤μg/L115500
Total Organic Carbon ≤μg/L201002001000


Technological Process
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